GaN freestanding waveguides on Si substrate for Si/GaN hybrid photonic integration

T. Sekiya, T. Sasaki, K. Hane

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper

Original language	Undefined/Unknown
Title of host publication	2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
DOIs	https://doi.org/10.1109/TRANSDUCERS.2015.7181361
Publication status	Published - 2015

Access to Document

@inproceedings{297f19665e65475d9360e31cb8db3b5e,

title = "GaN freestanding waveguides on Si substrate for Si/GaN hybrid photonic integration",

author = "T. Sekiya and T. Sasaki and K. Hane",

year = "2015",

doi = "10.1109/TRANSDUCERS.2015.7181361",

language = "undefiniert/unbekannt",

booktitle = "2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015",

}

TY - GEN

T1 - GaN freestanding waveguides on Si substrate for Si/GaN hybrid photonic integration

AU - Sekiya, T.

AU - Sasaki, T.

AU - Hane, K.

PY - 2015

Y1 - 2015

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-84955437593&partnerID=MN8TOARS

U2 - 10.1109/TRANSDUCERS.2015.7181361

DO - 10.1109/TRANSDUCERS.2015.7181361

M3 - Konferenzartikel

BT - 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

ER -