Fabrication of varifocal scanner integrated with piezoresistive focal length and angle sensor

K. Nakazawa, T. Sasaki, H. Furuta, J. Kamiya, H. Sasaki, T. Kamiya, K. Hane

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper

Original language	Undefined/Unknown
Title of host publication	International Conference on Optical MEMS and Nanophotonics
DOIs	https://doi.org/10.1109/OMN.2017.8051506
Publication status	Published - 2017

Access to Document

@inproceedings{22c5efcb715a44228edf091714c1632f,

title = "Fabrication of varifocal scanner integrated with piezoresistive focal length and angle sensor",

author = "K. Nakazawa and T. Sasaki and H. Furuta and J. Kamiya and H. Sasaki and T. Kamiya and K. Hane",

year = "2017",

doi = "10.1109/OMN.2017.8051506",

language = "undefiniert/unbekannt",

booktitle = "International Conference on Optical MEMS and Nanophotonics",

}

TY - GEN

T1 - Fabrication of varifocal scanner integrated with piezoresistive focal length and angle sensor

AU - Nakazawa, K.

AU - Sasaki, T.

AU - Furuta, H.

AU - Kamiya, J.

AU - Sasaki, H.

AU - Kamiya, T.

AU - Hane, K.

PY - 2017

Y1 - 2017

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-85035046355&partnerID=MN8TOARS

U2 - 10.1109/OMN.2017.8051506

DO - 10.1109/OMN.2017.8051506

M3 - Konferenzartikel

BT - International Conference on Optical MEMS and Nanophotonics

ER -