Fabrication of Ultrasonic Sensors Using Micro Cantilevers and Characteristic Measurement in Vacuum for Acoustic Emission Sensing

K. Takata, T. Sasaki, M. Tanaka, H. Saito, D. Matsuura, K. Hane

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Journal	Electronics and Communications in Japan
DOIs	https://doi.org/10.1002/ecj.11810
Publication status	Published - 2016

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title = "Fabrication of Ultrasonic Sensors Using Micro Cantilevers and Characteristic Measurement in Vacuum for Acoustic Emission Sensing",

author = "K. Takata and T. Sasaki and M. Tanaka and H. Saito and D. Matsuura and K. Hane",

year = "2016",

doi = "10.1002/ecj.11810",

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TY - JOUR

T1 - Fabrication of Ultrasonic Sensors Using Micro Cantilevers and Characteristic Measurement in Vacuum for Acoustic Emission Sensing

AU - Takata, K.

AU - Sasaki, T.

AU - Tanaka, M.

AU - Saito, H.

AU - Matsuura, D.

AU - Hane, K.

PY - 2016

Y1 - 2016

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-84961717999&partnerID=MN8TOARS

U2 - 10.1002/ecj.11810

DO - 10.1002/ecj.11810

M3 - Artikel

SN - 1942-9533

JO - Electronics and Communications in Japan

JF - Electronics and Communications in Japan

ER -