Fabrication of plasmonic nanopillar arrays based on nanoforming

Z. Li, T.D. Dao, T. Nagao, M. Terano, M. Yoshino

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Journal	Microelectronic Engineering
DOIs	https://doi.org/10.1016/j.mee.2015.04.086
Publication status	Published - 2015

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TY - JOUR

T1 - Fabrication of plasmonic nanopillar arrays based on nanoforming

AU - Li, Z.

AU - Dao, T.D.

AU - Nagao, T.

AU - Terano, M.

AU - Yoshino, M.

PY - 2015

Y1 - 2015

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-84928503015&partnerID=MN8TOARS

U2 - 10.1016/j.mee.2015.04.086

DO - 10.1016/j.mee.2015.04.086

M3 - Artikel

JO - Microelectronic Engineering

JF - Microelectronic Engineering

ER -