Fabrication of high Aspect-Ratio Si Pillar-based Hybrid plasmonic-photonic Crystal Waveguides for ultra-sensitive Infrared Gas-sensing Applications

Gerald Stocker; Jasmin Spettel; Thomas Grille; Thomas Ostermann; Reyhaneh Jannesari; Bernhard Kepler

doi:10.1109/asmc51741.2021.9435707

Fabrication of high Aspect-Ratio Si Pillar-based Hybrid plasmonic-photonic Crystal Waveguides for ultra-sensitive Infrared Gas-sensing Applications

Gerald Stocker, Jasmin Spettel, Thomas Grille, Thomas Ostermann, Reyhaneh Jannesari, Bernhard Kepler

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

Original language	English
Title of host publication	2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
DOIs	https://doi.org/10.1109/asmc51741.2021.9435707
Publication status	Published - 25 May 2021

Access to Document

10.1109/asmc51741.2021.9435707

Cite this

@inproceedings{121064ced0f7483596dd6cf440eb660e,

title = "Fabrication of high Aspect-Ratio Si Pillar-based Hybrid plasmonic-photonic Crystal Waveguides for ultra-sensitive Infrared Gas-sensing Applications",

author = "Gerald Stocker and Jasmin Spettel and Thomas Grille and Thomas Ostermann and Reyhaneh Jannesari and Bernhard Kepler",

year = "2021",

month = may,

day = "25",

doi = "10.1109/asmc51741.2021.9435707",

language = "English",

isbn = "9781728186450",

booktitle = "2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)",

}

Fabrication of high Aspect-Ratio Si Pillar-based Hybrid plasmonic-photonic Crystal Waveguides for ultra-sensitive Infrared Gas-sensing Applications. / Stocker, Gerald; Spettel, Jasmin; Grille, Thomas et al.
2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC). 2021.

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

TY - GEN

T1 - Fabrication of high Aspect-Ratio Si Pillar-based Hybrid plasmonic-photonic Crystal Waveguides for ultra-sensitive Infrared Gas-sensing Applications

AU - Stocker, Gerald

AU - Spettel, Jasmin

AU - Grille, Thomas

AU - Ostermann, Thomas

AU - Jannesari, Reyhaneh

AU - Kepler, Bernhard

PY - 2021/5/25

Y1 - 2021/5/25

UR - http://dx.doi.org/10.1109/asmc51741.2021.9435707

U2 - 10.1109/asmc51741.2021.9435707

DO - 10.1109/asmc51741.2021.9435707

M3 - Conference Paper

SN - 9781728186450

BT - 2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

ER -

Fabrication of high Aspect-Ratio Si Pillar-based Hybrid plasmonic-photonic Crystal Waveguides for ultra-sensitive Infrared Gas-sensing Applications

Access to Document

Other files and links

Cite this