Ex-situ AlN seed layer for (0001)-textured Al0.85Sc0.15N thin films grown on SiO2 substrates for shear mode resonators

Fazel Parsapour, Cosmin Silviu Sandu, Vladimir Pashchenko, Stefan Mertin, Nicolas Kurz, Pascal Nicolay, Paul Muralt

    Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

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    Physics & Astronomy