Evaluation of Scanning Micromirror with Acoustic Cavity

T. Sasaki, T. Kanesawa, K. Hane

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper

Original language	Undefined/Unknown
Title of host publication	International Conference on Optical MEMS and Nanophotonics
DOIs	https://doi.org/10.1109/OMN.2018.8454523
Publication status	Published - 2018

Access to Document

TY - GEN

T1 - Evaluation of Scanning Micromirror with Acoustic Cavity

AU - Sasaki, T.

AU - Kanesawa, T.

AU - Hane, K.

PY - 2018

Y1 - 2018

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-85053939831&partnerID=MN8TOARS

U2 - 10.1109/OMN.2018.8454523

DO - 10.1109/OMN.2018.8454523

M3 - Konferenzartikel

BT - International Conference on Optical MEMS and Nanophotonics

ER -