Abstract
Various nanostructures with a feature sizes down to 50 nm as well as photonic structures such as waveguides or grating couplers were successfully replicated into the thermoplastic polymer polymethylpentene employing an injection molding process. Polymethylpentene has highly attractive characteristics for photonic and life-science applications such as a high thermal stability, an outstanding chemical resistivity and excellent optical transparency. In our injection molding process, the structures were directly replicated from 2" silicon wafers that serve as an exchangeable mold insert in the injection mold. We present this injection molding process as a versatile technology platform for the realization of optical integrated devices and diffractive optical components. In particular, we show the application of the injection molding process for the realization of waveguide and grating coupler structures, subwavelength gratings and focusing nanoholes. © 2010 Copyright SPIE - The International Society for Optical Engineering.
Original language | English |
---|---|
DOIs | |
Publication status | Published - 2010 |
Externally published | Yes |
Keywords
- Feature sizes
- Grating couplers
- High thermal stability
- Injection molding process
- Injection molds
- Life-sciences
- Mold inserts
- Nanoholes
- Optical components
- Optical integrated devices
- Optical transparency
- Photonic structure
- Polymethylpentene
- Sub-wave length grating
- Technology platforms
- Thermoplastic polymer
- Chemical stability
- Ion beams
- Molds
- Nanostructures
- Polymers
- Semiconducting silicon compounds
- Silicon wafers
- Waveguides
- Injection molding