Confocal laser displacement sensor using MEMS varifocal mirror

K. Nakazawa, T. Sasaki, H. Furnia, J. Kamiya, H. Sasaki, T. Kamiya, K. Hane

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper

Original language	Undefined/Unknown
Title of host publication	TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
DOIs	https://doi.org/10.1109/TRANSDUCERS.2017.7994498
Publication status	Published - 2017

Access to Document

@inproceedings{542a682cd9af40009577f409152ad53e,

title = "Confocal laser displacement sensor using MEMS varifocal mirror",

author = "K. Nakazawa and T. Sasaki and H. Furnia and J. Kamiya and H. Sasaki and T. Kamiya and K. Hane",

year = "2017",

doi = "10.1109/TRANSDUCERS.2017.7994498",

language = "undefiniert/unbekannt",

booktitle = "TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems",

}

TY - GEN

T1 - Confocal laser displacement sensor using MEMS varifocal mirror

AU - Nakazawa, K.

AU - Sasaki, T.

AU - Furnia, H.

AU - Kamiya, J.

AU - Sasaki, H.

AU - Kamiya, T.

AU - Hane, K.

PY - 2017

Y1 - 2017

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-85029371517&partnerID=MN8TOARS

U2 - 10.1109/TRANSDUCERS.2017.7994498

DO - 10.1109/TRANSDUCERS.2017.7994498

M3 - Konferenzartikel

BT - TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

ER -