Confocal laser displacement sensor using a micro-machined varifocal mirror

K. Nakazawa, T. Sasaki, H. Furuta, J. Kamiya, H. Sasaki, T. Kamiya, K. Hane

Research output: Contribution to journal › Article › peer-review

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TY - JOUR

T1 - Confocal laser displacement sensor using a micro-machined varifocal mirror

AU - Nakazawa, K.

AU - Sasaki, T.

AU - Furuta, H.

AU - Kamiya, J.

AU - Sasaki, H.

AU - Kamiya, T.

AU - Hane, K.

PY - 2017

Y1 - 2017

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-85027589693&partnerID=MN8TOARS

U2 - 10.1364/AO.56.006911

DO - 10.1364/AO.56.006911

M3 - Artikel

SN - 1559-128X

JO - Applied Optics

JF - Applied Optics

ER -