CMOS-compatible silicon nitride waveguide photonic building blocks and their application for optical coherence tomography and other sensing applications

Rainer Hainberger; Paul Muellner; Moritz Eggeling; Alejandro Maese-Novo; Stefan Nevlacsil; Jörg Schotter; Florian Vogelbacher; Jochen Kraft; Martin Sagmeister; Xue Zhou; Jinhua Huang; Mingzhu Li; Ke-Jian Jiang; Yanlin Song; Dana Seyringer; Elisabet Rank; Wolfgang Drexler; Sonia m. García-Blanco

doi:10.1117/12.2543585

CMOS-compatible silicon nitride waveguide photonic building blocks and their application for optical coherence tomography and other sensing applications

Rainer Hainberger, Paul Muellner, Moritz Eggeling, Alejandro Maese-Novo, Stefan Nevlacsil, Jörg Schotter, Florian Vogelbacher, Jochen Kraft, Martin Sagmeister, Xue Zhou, Jinhua Huang, Mingzhu Li, Ke-Jian Jiang, Yanlin Song, Dana Seyringer, Elisabet Rank, Wolfgang Drexler, Sonia m. García-Blanco (Editor)

Research output: Contribution to conference (No Proceedings) › Paper

Abstract

In this paper, we report our recent advances in the development of CMOS compatible PECVD silicon nitride waveguide based photonic key building blocks for optical coherence tomography (OCT) in the 850 nm wavelength region and for biosensing applications in the visible domain around 650 nm wavelength. We discuss the design and experimental verification of compact low-loss waveguide bends, broadband couplers with varying power splitting ratios required for PIC based OCT systems, arrayed waveguide gratings for spectral domain OCT, and a monolithically integrated optically pumped organic solid-state laser for low-cost biosensing applications.

Original language	English
DOIs	https://doi.org/10.1117/12.2543585
Publication status	Published - 25 Feb 2020
Externally published	Yes
Event	Integrated Optics: Devices, Materials, and Technologies XXIV - San Francisco, United States Duration: 1 Feb 2020 → 6 Feb 2020

Conference

Conference	Integrated Optics: Devices, Materials, and Technologies XXIV
Period	1/02/20 → 6/02/20

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10.1117/12.2543585

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Hainberger, R., Muellner, P., Eggeling, M., Maese-Novo, A., Nevlacsil, S., Schotter, J., Vogelbacher, F., Kraft, J., Sagmeister, M., Zhou, X., Huang, J., Li, M., Jiang, K.-J., Song, Y., Seyringer, D., Rank, E., Drexler, W., & García-Blanco, S. M. (Ed.) (2020). CMOS-compatible silicon nitride waveguide photonic building blocks and their application for optical coherence tomography and other sensing applications. Paper presented at Integrated Optics: Devices, Materials, and Technologies XXIV. https://doi.org/10.1117/12.2543585

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title = "CMOS-compatible silicon nitride waveguide photonic building blocks and their application for optical coherence tomography and other sensing applications",

abstract = "In this paper, we report our recent advances in the development of CMOS compatible PECVD silicon nitride waveguide based photonic key building blocks for optical coherence tomography (OCT) in the 850 nm wavelength region and for biosensing applications in the visible domain around 650 nm wavelength. We discuss the design and experimental verification of compact low-loss waveguide bends, broadband couplers with varying power splitting ratios required for PIC based OCT systems, arrayed waveguide gratings for spectral domain OCT, and a monolithically integrated optically pumped organic solid-state laser for low-cost biosensing applications.",

author = "Rainer Hainberger and Paul Muellner and Moritz Eggeling and Alejandro Maese-Novo and Stefan Nevlacsil and J{\"o}rg Schotter and Florian Vogelbacher and Jochen Kraft and Martin Sagmeister and Xue Zhou and Jinhua Huang and Mingzhu Li and Ke-Jian Jiang and Yanlin Song and Dana Seyringer and Elisabet Rank and Wolfgang Drexler and Garc{\'i}a-Blanco, {Sonia m.}",

year = "2020",

month = feb,

day = "25",

doi = "10.1117/12.2543585",

language = "English",

note = "Integrated Optics: Devices, Materials, and Technologies XXIV ; Conference date: 01-02-2020 Through 06-02-2020",

}

Hainberger, R, Muellner, P, Eggeling, M, Maese-Novo, A, Nevlacsil, S, Schotter, J, Vogelbacher, F, Kraft, J, Sagmeister, M, Zhou, X, Huang, J, Li, M, Jiang, K-J, Song, Y, Seyringer, D, Rank, E, Drexler, W & García-Blanco, SM (ed.) 2020, 'CMOS-compatible silicon nitride waveguide photonic building blocks and their application for optical coherence tomography and other sensing applications', Paper presented at Integrated Optics: Devices, Materials, and Technologies XXIV, 1/02/20 - 6/02/20. https://doi.org/10.1117/12.2543585

CMOS-compatible silicon nitride waveguide photonic building blocks and their application for optical coherence tomography and other sensing applications. / Hainberger, Rainer; Muellner, Paul; Eggeling, Moritz et al.
2020. Paper presented at Integrated Optics: Devices, Materials, and Technologies XXIV.

Research output: Contribution to conference (No Proceedings) › Paper

TY - CONF

T1 - CMOS-compatible silicon nitride waveguide photonic building blocks and their application for optical coherence tomography and other sensing applications

AU - Hainberger, Rainer

AU - Muellner, Paul

AU - Eggeling, Moritz

AU - Maese-Novo, Alejandro

AU - Nevlacsil, Stefan

AU - Schotter, Jörg

AU - Vogelbacher, Florian

AU - Kraft, Jochen

AU - Sagmeister, Martin

AU - Zhou, Xue

AU - Huang, Jinhua

AU - Li, Mingzhu

AU - Jiang, Ke-Jian

AU - Song, Yanlin

AU - Seyringer, Dana

AU - Rank, Elisabet

AU - Drexler, Wolfgang

A2 - García-Blanco, Sonia m.

PY - 2020/2/25

Y1 - 2020/2/25

N2 - In this paper, we report our recent advances in the development of CMOS compatible PECVD silicon nitride waveguide based photonic key building blocks for optical coherence tomography (OCT) in the 850 nm wavelength region and for biosensing applications in the visible domain around 650 nm wavelength. We discuss the design and experimental verification of compact low-loss waveguide bends, broadband couplers with varying power splitting ratios required for PIC based OCT systems, arrayed waveguide gratings for spectral domain OCT, and a monolithically integrated optically pumped organic solid-state laser for low-cost biosensing applications.

AB - In this paper, we report our recent advances in the development of CMOS compatible PECVD silicon nitride waveguide based photonic key building blocks for optical coherence tomography (OCT) in the 850 nm wavelength region and for biosensing applications in the visible domain around 650 nm wavelength. We discuss the design and experimental verification of compact low-loss waveguide bends, broadband couplers with varying power splitting ratios required for PIC based OCT systems, arrayed waveguide gratings for spectral domain OCT, and a monolithically integrated optically pumped organic solid-state laser for low-cost biosensing applications.

U2 - 10.1117/12.2543585

DO - 10.1117/12.2543585

M3 - Paper

T2 - Integrated Optics: Devices, Materials, and Technologies XXIV

Y2 - 1 February 2020 through 6 February 2020

ER -

CMOS-compatible silicon nitride waveguide photonic building blocks and their application for optical coherence tomography and other sensing applications

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