Capacitive micromachined ultrasonic transducers for transmitting and receiving ultrasound in air

Yihe Zhao, Libo Zhao, Zhikang Li, Jie Li, Ping Yang, Tingzhong Xu, Zichen Liu, Shuaishuai Guo, Jiuhong Wang, Zhuangde Jiang

    Research output: Contribution to journal › Article › peer-review

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    Engineering & Materials Science

    Chemical Compounds