Original language | Undefined/Unknown |
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Journal | IEEJ Transactions on Sensors and Micromachines |
DOIs | |
Publication status | Published - 2015 |
Acoustic emission sensors using silicon mechanical resonators
K. Takata, T. Sasaki, M. Nishizawa, H. Saito, S. Yamazaki, D. Matsuura, K. Hane
Research output: Contribution to journal › Article › peer-review