A Through-Hole Capacitive Micromachined Ultrasonic Transdcuer with High Perfromance

Jie Li, Libo Zhao, Dejiang Lu, Zhikang Li, Yihe Zhao, Tingzhong Xu, Shuaishuai Guo, Jiuhong Wang, Yulong Zhao, Zhuangde Jiang

Research output: Conference proceeding/Chapter in Book/Report/Conference Paperpeer-review

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Physics & Astronomy