A process for laser-induced graphene on any substrate

In this work a versatile approach for the creation of laser-induced graphene (LIG) onto virtually any kind of substrate is demonstrated. The process is based on preconditioning the substrate with a layer of polyimide sealing resin and subsequently laser scribing the LIG structure onto it. By optimizing the laser process, the resulting LIG is firmly attached to the substrate and the unutilized resin is entirely removed. Most substrates are not amenable for LIG fabrication, including glass or metals. Using this process, LIG strain, temperature as well as humidity sensors have been fabricated on various substrates. The process features the same advantages of easy and fast patterning which LIG is well known for and enables sensor fabrication directly on the substrate.