| Original language | English |
|---|---|
| Pages | 855 - 857 |
| Publication status | Published - 2017 |
| Event | MikroSystemTechnikKongress 2017 - Duration: 1 Jan 2017 → … |
Conference
| Conference | MikroSystemTechnikKongress 2017 |
|---|---|
| Period | 1/01/17 → … |
A New Approach for In-Line Heat Chuck Temperature Measurement Based on SAW Technology
Martin Lenzhofer, W. Stocksreiter, S. Szirch
Research output: Contribution to conference (No Proceedings) › Paper › peer-review