一种具有t形空腔结构的空气耦合cmut及其制备方法

Translated title of the contribution: A kind of Air Coupling CMUT and preparation method thereof with T shape cavity structure

Zhikang Li (Inventor), Libo Zhao (Inventor), Yihe Zhao (Inventor), Jie Li (Inventor), Tingzhong Xu (Inventor), Guoxi Luo (Inventor), Shuaishuai Guo (Inventor), Zhuangde Jiang (Inventor)

    Research output: Patent

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    Engineering & Materials Science