15μM air gap 8×8/4×4 pixels single crystal silicon continuous membrane deformable mirror

T. Wu; T. Sasaki; M. Akiyama; K. Hane

doi:10.1109/Transducers.2013.6627314

15μM air gap 8×8/4×4 pixels single crystal silicon continuous membrane deformable mirror

T. Wu, T. Sasaki, M. Akiyama, K. Hane

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper

Original language	Undefined/Unknown
Title of host publication	2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
DOIs	https://doi.org/10.1109/Transducers.2013.6627314
Publication status	Published - 2013

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10.1109/Transducers.2013.6627314

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@inproceedings{b774c580545942bc971ec86a168edde0,

title = "15μM air gap 8×8/4×4 pixels single crystal silicon continuous membrane deformable mirror",

author = "T. Wu and T. Sasaki and M. Akiyama and K. Hane",

year = "2013",

doi = "10.1109/Transducers.2013.6627314",

language = "undefiniert/unbekannt",

booktitle = "2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013",

}

15μM air gap 8×8/4×4 pixels single crystal silicon continuous membrane deformable mirror. / Wu, T.; Sasaki, T.; Akiyama, M. et al.
2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. 2013.

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper

TY - GEN

T1 - 15μM air gap 8×8/4×4 pixels single crystal silicon continuous membrane deformable mirror

AU - Wu, T.

AU - Sasaki, T.

AU - Akiyama, M.

AU - Hane, K.

PY - 2013

Y1 - 2013

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-84891674795&partnerID=MN8TOARS

U2 - 10.1109/Transducers.2013.6627314

DO - 10.1109/Transducers.2013.6627314

M3 - Konferenzartikel

BT - 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

ER -

15μM air gap 8×8/4×4 pixels single crystal silicon continuous membrane deformable mirror

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