变频自聚焦混合驱动收发一体化pmut单元及其制备方法

Translated title of the contribution: Transceiving integrated PMUT unit of frequency conversion self-focusing combination drive and preparation method

Libo Zhao (Inventor), Tingzhong Xu (Inventor), Shuaishuai Guo (Inventor), Zhikang Li (Inventor), Ping Yang (Inventor), Jie Li (Inventor), Yihe Zhao (Inventor), Zichen Liu (Inventor), Zhuangde Jiang (Inventor)

    Research output: Patent

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    Engineering & Materials Science