一种通孔电容式微加工超声换能器及其制备方法

Translated title of the contribution: kind of through-hole capacitance type micromachined ultrasonic energy converter and preparation method

Libo Zhao (Inventor), Jie Li (Inventor), Zhikang Li (Inventor), Dejiang Lu (Inventor), Yihe Zhao (Inventor), Tingzhong Xu (Inventor), Shuaishuai Guo (Inventor), Zichen Liu (Inventor), Zhuangde Jiang (Inventor)

    Research output: Patent

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    Engineering & Materials Science