Abstract
The invention provides a waveguide and a preparation method thereof. The preparation method comprises the steps that a low-refractive-index layer is prepared on a substrate, a sulfide glass film layer is prepared on the low-refractive-index layer and is an optical transmission layer and a guide structure is prepared on the optical transmission layer, wherein both the refractive index of the low-refractive-index layer and the refractive index of the guide structure are smaller than that of the optical transmission layer. According to the waveguide and the preparation method thereof, the reliability of preparing the waveguide can be improved, and the success rate of preparing the waveguide can be increased.
| Translated title of the contribution | A new type of waveguide and its preparation method |
|---|---|
| Original language | Chinese (Simplified) |
| Filing date | 1/10/14 |
| Publication status | Published - 1 Oct 2014 |
| Externally published | Yes |