一种梳齿式CMUTs流体密度传感器及其制备方法

Translated title of the contribution: A kind of comb-tooth-type CMUTs fluid density sensor and preparation method

Libo Zhao (Inventor), Jie Li (Inventor), Zhikang Li (Inventor), Dejiang Lu (Inventor), Yihe Zhao (Inventor), Jiawang Zhang (Inventor), Tingzhong Xu (Inventor), Zhuangde Jiang (Inventor)

    Research output: Patent

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    Physics & Astronomy