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2019 Shop Note Award by the American Vacuum Society
Pilz, Julian
(Recipient)
Prize
Description
Award for the publication "Universal software for the real-time control of sequential processing techniques", J. Vac. Sci. Technol. A 37, 063201 (2019); https://doi.org/10.1116/1.5125052
Awarded date
2019
Granting Organisations
X