Physics & Astronomy
actuation
17%
characterization
7%
chips
81%
crystals
8%
cycles
13%
diffractive optics
57%
electron beams
6%
emitters
7%
etching
6%
excitation
6%
fabrication
34%
figure of merit
29%
frequency response
41%
gases
21%
gimbals
9%
harmonics
26%
high aspect ratio
45%
holography
41%
hysteresis
14%
infrared spectroscopy
7%
International System of Units
10%
lithography
7%
membranes
20%
microelectromechanical systems
88%
mirrors
100%
modulation transfer function
6%
nanofabrication
10%
performance
15%
photonics
29%
piezoelectric actuators
17%
platforms
14%
range (extremes)
7%
resonant frequencies
12%
scanning
26%
sensors
20%
thin films
7%
waveguides
28%