@conference{0d169e881ad44cb3adc7393fe68b815d,
title = "Smart slit assembly employing continuously tunable MEMS shutter",
author = "Anton Lagosh and Gergely Huszka and Hamed Sattari and Berit Ahlers and Benedikt Guldimann and Gr{\'e}goire Kerr and Mauro Melozzi and Peyman Rahnama and Takeshi Nishizawa and Niels Quack",
year = "2021",
month = mar,
day = "5",
doi = "10.1117/12.2583149",
language = "English",
pages = "116970P",
note = "MOEMS and Miniaturized Systems XX ; Conference date: 06-03-2021 Through 12-03-2021",
}