Parametric amplification of a resonant MEMS mirror with all-piezoelectric excitation

Physik & Astronomy

• microelectromechanical systems 100%
• stiffness 90%
• mirrors 73%
• excitation 50%
• tuning 31%
• pumps 29%
• modulation 27%
• strokes 23%
• Q factors 17%
• pumping 17%
• actuators 16%
• amplifiers 16%
• direct current 16%
• nonlinearity 15%
• frequency ranges 15%
• saturation 14%
• harmonics 14%
• electric potential 11%