Opto-chemical control through thermal treatment of plasma enhanced atomic layer deposited ZnO: An in situ study

Alberto Perrotta, Julian Pilz, Antonella Milella, Anna Maria Coclite

Publikation: Beitrag in Fachzeitschrift › Artikel › Begutachtung

Zugriff auf Dokument

TY - JOUR

T1 - Opto-chemical control through thermal treatment of plasma enhanced atomic layer deposited ZnO: An in situ study

AU - Perrotta, Alberto

AU - Pilz, Julian

AU - Milella, Antonella

AU - Coclite, Anna Maria

PY - 2019

Y1 - 2019

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-85063544853&partnerID=MN8TOARS

U2 - 10.1016/j.apsusc.2019.03.122

DO - 10.1016/j.apsusc.2019.03.122

M3 - Artikel

JO - Applied Surface Science

JF - Applied Surface Science

ER -