Modeling and analysis of a novel combined peninsula-island structure diaphragm for ultra-low pressure sensing with high sensitivity

Physik & Astronomy

• peninsulas 100%
• diaphragms 69%
• low pressure 51%
• sensitivity 36%
• stress concentration 12%
• pressure sensors 6%
• partial differential equations 5%
• microelectromechanical systems 5%
• deflection 5%
• finite element method 4%
• nonlinearity 4%
• mirrors 3%
• optimization 3%
• sensors 3%
• energy 3%
• simulation 2%

Chemische Bestandteile

• Strain Energy 78%
• Pressure Sensor 43%
• Pressure 35%
• Resonance 24%
• Dimension 23%
• Simulation 19%

Ingenieurwesen & Materialwissenschaft

• Diaphragms 67%
• Strain energy 12%
• Stress concentration 9%
• Pressure sensors 5%
• Mirrors 5%
• Partial differential equations 5%
• MEMS 5%
• Finite element method 3%
• Sensors 2%