Microscale sensor systems based on AMR sensors

Physik & Astronomy

• microbalances 100%
• sensors 60%
• poles 21%
• permanent magnets 19%
• magnetic fields 18%
• magnets 15%
• output 14%
• Wheatstone bridges 9%
• fabrication 7%
• nanofabrication 7%
• sensitivity 7%
• Permalloys (trademark) 7%
• footprints 6%
• current distribution 6%
• systems engineering 6%
• electric potential 6%
• high aspect ratio 6%
• electric current 6%
• microelectromechanical systems 5%
• linearity 5%
• CMOS 5%
• coverings 5%
• spacing 4%
• simulation 4%
• costs 4%
• solid state 4%
• membranes 4%
• saturation 4%
• anisotropy 3%
• probes 3%
• configurations 3%
• electronics 3%
• temperature 1%