Maskless lithography for versatile and low cost fabrication of polymer based micro optical structures

Physik & Astronomy

• lithography 100%
• waveguides 79%
• fabrication 72%
• polymers 69%
• gratings 34%
• embossing 32%
• propagation 28%
• light modulators 25%
• diffraction 25%
• polymethyl methacrylate 24%
• optical measurement 24%
• optical waveguides 23%
• illuminating 23%
• optical communication 20%
• projection 19%
• photonics 16%
• microstructure 14%
• wavelengths 11%
• performance 10%