Abstract
This paper reports design, microfabrication and characterization of a new resonant piston mode thin-film piezo based micromirror, optimized for high-speed Fourier transform spectroscopy. The device is 5x5 mm in size and features an optical membrane of 3 mm, suspended by six individually controlled Archimedean springs. The mirror achieves a total vertical stroke of more than 250 µm at 3.6 kHz under atmospheric pressure, allowing for high-speed transient spectroscopic analysis. This to the best of our knowledge the first time that a piezo MEMS mirror was reported in a Fourier transform spectrometer.
| Originalsprache | Englisch |
|---|---|
| Titel | Transducers 2023 |
| Publikationsstatus | Veröffentlicht - Juli 2023 |