Fabrication of suspended microchannel resonators with integrated piezoelectric transduction

Physik & Astronomy

• microchannels 100%
• resonators 70%
• fabrication 57%
• fluidics 55%
• viscous drag 33%
• fluids 27%
• actuation 24%
• proximity 22%
• readout 21%
• flat surfaces 21%
• Q factors 20%
• transducers 19%
• damping 18%
• etching 17%
• wafers 17%
• viscosity 17%
• electrodes 14%
• sensors 14%
• water 13%
• geometry 13%
• liquids 12%
• thin films 12%