Fabrication of Highly Metallic TiN Films by Pulsed Laser Deposition Method for Plasmonic Applications

Ramu Pasupathi Sugavaneshwar, Satoshi Ishii, Thang Duy Dao, Akihiko Ohi, Toshihide Nabatame, Tadaaki Nagao

Publikation: Beitrag in Fachzeitschrift › Artikel › Begutachtung

Zugriff auf Dokument

@article{8f8d12e71c584e5b92f777d71472fb9d,

title = "Fabrication of Highly Metallic TiN Films by Pulsed Laser Deposition Method for Plasmonic Applications",

author = "Sugavaneshwar, {Ramu Pasupathi} and Satoshi Ishii and Dao, {Thang Duy} and Akihiko Ohi and Toshihide Nabatame and Tadaaki Nagao",

year = "2018",

month = mar,

day = "21",

doi = "10.1021/acsphotonics.7b00942",

language = "undefiniert/unbekannt",

}

TY - JOUR

T1 - Fabrication of Highly Metallic TiN Films by Pulsed Laser Deposition Method for Plasmonic Applications

AU - Sugavaneshwar, Ramu Pasupathi

AU - Ishii, Satoshi

AU - Dao, Thang Duy

AU - Ohi, Akihiko

AU - Nabatame, Toshihide

AU - Nagao, Tadaaki

PY - 2018/3/21

Y1 - 2018/3/21

UR - https://doi.org/10.1021/acsphotonics.7b00942

U2 - 10.1021/acsphotonics.7b00942

DO - 10.1021/acsphotonics.7b00942

M3 - Artikel

SN - 2330-4022

JO - ACS Photonics

JF - ACS Photonics

ER -