Design rules for a compact and low-cost optical position sensing of moems tilt mirrors based on a Gaussian-shaped light source

Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel › Begutachtung

Originalsprache	undefiniert/unbekannt
Titel	Proceedings of SPIE - The International Society for Optical Engineering
DOIs	https://doi.org/10.1117/12.2019251
Publikationsstatus	Veröffentlicht - 2013

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title = "Design rules for a compact and low-cost optical position sensing of moems tilt mirrors based on a Gaussian-shaped light source",

author = "M. Baumgart and A. Tortschanoff",

year = "2013",

doi = "10.1117/12.2019251",

language = "undefiniert/unbekannt",

booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

}

TY - GEN

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AU - Baumgart, M.

AU - Tortschanoff, A.

PY - 2013

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U2 - 10.1117/12.2019251

DO - 10.1117/12.2019251

M3 - Konferenzartikel

BT - Proceedings of SPIE - The International Society for Optical Engineering

ER -