Defect detection in high quality polymers used in the semiconductor manufacturing industry

C. Hirschl; T. Arnold; S. Meislitzer; T. Moldaschl; M. De Biasio; L. Neumaier; A. Molzbichler; H. Cramer; G. Oreski; M. Kraft

Defect detection in high quality polymers used in the semiconductor manufacturing industry

C. Hirschl, T. Arnold, S. Meislitzer, T. Moldaschl, M. De Biasio, L. Neumaier, A. Molzbichler, H. Cramer, G. Oreski, M. Kraft

Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel › Begutachtung

Originalsprache	Englisch
Titel	Smart Systems Integration 2018 - International Conference and Exhibition on Integration Issues of Miniaturized Systems
Publikationsstatus	Veröffentlicht - 2018

Andere Dateien und Links

http://www.scopus.com/inward/record.url?eid=2-s2.0-85054787171&partnerID=MN8TOARS

Dieses zitieren

@inproceedings{c07438363e694b6e99f05ed4f7843a41,

title = "Defect detection in high quality polymers used in the semiconductor manufacturing industry",

author = "C. Hirschl and T. Arnold and S. Meislitzer and T. Moldaschl and {De Biasio}, M. and L. Neumaier and A. Molzbichler and H. Cramer and G. Oreski and M. Kraft",

year = "2018",

language = "English",

booktitle = "Smart Systems Integration 2018 - International Conference and Exhibition on Integration Issues of Miniaturized Systems",

}

TY - GEN

T1 - Defect detection in high quality polymers used in the semiconductor manufacturing industry

AU - Hirschl, C.

AU - Arnold, T.

AU - Meislitzer, S.

AU - Moldaschl, T.

AU - De Biasio, M.

AU - Neumaier, L.

AU - Molzbichler, A.

AU - Cramer, H.

AU - Oreski, G.

AU - Kraft, M.

PY - 2018

Y1 - 2018

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-85054787171&partnerID=MN8TOARS

M3 - Conference Paper

BT - Smart Systems Integration 2018 - International Conference and Exhibition on Integration Issues of Miniaturized Systems

ER -