CMUTs谐振式生化传感器的低电压阻抗匹配方法及匹配网络

The invention discloses CMUTSThe low-voltage impedance matching process and matching network of resonant mode biochemical sensor, the low-voltage impedance matching process of CMUTs resonant mode biochemical sensor, including voltage source, LC tuning network, CMUTs equivalent circuit network and laod network.Voltage source, predominantly LC tuning network, CMUTs equivalent circuit network and laod network provide alternating voltage.By LC tuning network, to CMUTs equivalent circuit network, the reactance at parallel resonance frequency carries out impedance matching, makes its series parallel resonance frequency zero crossing.The present invention, which makes CMUTs at low voltage, has the series parallel resonance frequency of zero crossing, and the impedance matching methods are simple and convenient, can make CMUTs resonance, reflection loss S in the case where being less than 30V DC offset voltage11It is reduced between -25dB~-40dB in resonant operational frequency point, improves return loss S21Greater than -3dB, reduces CMUTs power consumption and improve efficiency of transmission.