AMR Sensor Array Design for the Realization of a 3D Magnetic Tactile Sensor

Stefano Lumetti, Perla Malago, Peter Stürmer, Francisco Ferreira Relvao, Michael Ortner

Publikation: Konferenzband/Beitrag in Buch/BerichtKonferenzartikelBegutachtung

Abstract

The design of arrays of anisotropic magnetoresistive (AMR) sensors capable of detecting and reconstructing the 3D motion of a permanent magnet, and thus, suitable for the development of a 3D magnetic tactile sensor, is reported. The proposed structure allows for probing the 3D magnet displacements—and, hence, to infer the three components of the applied force—via a purely planar arrangement of monolithically microfabricated AMR sensors. The concept presented here also holds potential for the realization of a wide spectrum of easy-to-fabricate, miniaturized and low-cost sensors suitable for the detection of a broad variety of physical observables.
OriginalspracheEnglisch
TitelProceedings 2024
Herausgeber (Verlag)MDPI AG
Band97
DOIs
PublikationsstatusVeröffentlicht - 22 Apr. 2024

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