AMR sensor array design for the realization of a 3D magnetic tactile sensor

The design of arrays of anisotropic magnetoresistive (AMR) sensors capable of detecting and reconstructing the 3D motion of a permanent magnet and thus suitable for the development of a 3D magnetic tactile sensor is reported. The proposed structure allows for probing the 3D magnet displacements – and hence to infer the three components of the applied force – via a purely planar arrangement of monolithically microfabricated AMR sensors. The concept presented here also holds potential for the realization of a wide spectrum of easy-to-fabricate, miniaturized and low-cost sensors suitable for the detection of a broad variety of physical observables.