AlGaN/GaN MOSHEMTS with selective removal of In-Situ Grown SiN Passivation

M. Capriotti, A. Alexewicz, O. Bethge, D. Visalli, J. Derluyn, C. Fleury, E. Bertagnolli, D. Pogany, G. Strasser

Publikation: Konferenzbeitrag › Papier

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@conference{4c7acf02dd3944b586615ff38d3cf930,

title = "AlGaN/GaN MOSHEMTS with selective removal of In-Situ Grown SiN Passivation",

author = "M. Capriotti and A. Alexewicz and O. Bethge and D. Visalli and J. Derluyn and C. Fleury and E. Bertagnolli and D. Pogany and G. Strasser",

year = "2013",

month = may,

day = "1",

language = "undefiniert/unbekannt",

pages = "67 -- 68",

}