A CMUT-based gas density sensor with high sensitivity

Libo Zhao, Jie Li, Zhikang Li, Yihe Zhao, Guoxi Luo, Tingzhong Xu, Shuaishuai Guo, Zichen Liu, Jiuhong Wang, Zhuangde Jiang

Publikation: Beitrag in Fachzeitschrift › Artikel › Begutachtung