100GHz-Band On-Chip 1x2 Phased Array Antenna Fed By Hybrid Coupler On 45nm CMOS SOI

This paper presents a 100GHz-band beam steering array antenna based on 45nm CMOS silicon on insulator technology of high resistivity .cm. An inset-fed patch antenna is designed as the radiating element. The maximum simulated gain is 5.8dBi at 100GHz. A 90 0 Branch Line Hybrid Coupler is designed as the Beamforming Network (BFN). To miniaturize the design, the BFN is inserted into the /2 inter-space between the two antenna elements. The concept is demonstrated in the 80-120GHz bandwidth with a array, achieving a simulated 7.5dBi maximum realized gain and ±22 0 beam scan angles in 1-D. The measurement of the return losses shows good agreement with the simulations. The array antenna’s total chip area is 2.548mm 2 .