压电式微加工超声传感器的关键技术研究

Ingenieurwesen & Materialwissenschaft

• Ultrasonic transducers 100%
• Piezoelectric transducers 88%
• Transducers 66%
• Ultrasonics 60%
• Equivalent circuits 18%
• Crosstalk 17%
• Cavity resonators 10%
• MEMS 10%
• Fabrication 8%
• Diaphragms 8%
• Acoustics 6%
• Ultrasonic imaging 6%
• Acoustic impedance 5%
• Wafer bonding 5%
• Stiffness 5%
• Coupled circuits 5%
• Structural optimization 4%
• Cost effectiveness 4%
• Testing 4%
• Amplification 4%
• Structural design 3%
• Frequency response 3%
• Radiation 3%
• Calibration 3%
• Fluids 2%
• Finite element method 2%
• Networks (circuits) 2%
• Temperature 1%
• Costs 1%
• Experiments 1%