Physik & Astronomy
acoustics
24%
actuation
27%
aluminum
7%
aluminum nitrides
23%
argon
5%
cavities
12%
cavity resonators
5%
cells
11%
chips
71%
coefficients
5%
contamination
18%
costs
7%
coverings
7%
deviation
9%
elastic waves
8%
electric potential
5%
electronics
5%
ellipsometry
25%
engineering
15%
etching
68%
fabrication
12%
filters
7%
fluids
9%
flux density
15%
gas flow
10%
gases
30%
geometry
8%
glass
5%
gyroscopes
22%
harmonics
31%
heat generation
18%
high aspect ratio
21%
holders
20%
insulators
15%
interactions
8%
low frequencies
14%
low pressure
5%
masks
29%
microchannels
21%
microelectromechanical systems
59%
modes (standing waves)
8%
molybdenum
20%
monitors
6%
nitrides
28%
nitrogen
5%
nuclear magnetic resonance
12%
optimization
13%
oxides
8%
packaging
21%
paradoxes
10%
performance
13%
photonics
37%
photoresists
21%
plasma etching
23%
platforms
14%
polymers
11%
resistors
6%
resonators
15%
scandium
19%
selectivity
17%
sensors
10%
shielding
6%
silicon
28%
silicon nitrides
19%
silicon oxides
21%
simulation
7%
sodium
18%
standing waves
7%
temperature
5%
thin films
19%
transducers
100%
trapping
15%
ultrasonics
15%
vapor deposition
18%
vapors
15%
wafers
20%
waveguides
17%