ZnO Thin Films Grown by Plasma‐Enhanced Atomic Layer Deposition: Material Properties Within and Outside the “Atomic Layer Deposition Window”

Julian Pilz, Alberto Perrotta, Günther Leising, Anna Maria Coclite

Research output: Contribution to journalArticlepeer-review

Original languageAmerican English
Journalphysica status solidi (a)
DOIs
Publication statusPublished - 8 Apr 2020
Externally publishedYes

Cite this