ZnO thin films grown by plasma-enhanced atomic layer deposition: material properties in and outside the ALD window

Julian Pilz

Research output: Contribution to conference (No Proceedings) › Abstract › peer-review

Original languageEnglish
Publication statusPublished - 2019
Externally publishedYes
EventEuroCVD 22 Baltic ALD 16 Conference - Luxembourg, Luxembourg
Duration: 24 Jun 2019 → …

Conference

ConferenceEuroCVD 22 Baltic ALD 16 Conference
Country/TerritoryLuxembourg
CityLuxembourg
Period24/06/19 → …

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