Wafer-scale integration of piezo- and ferroelectric Al0.64Sc0.36N thin films by reactive sputtering

Sanjay Nayak; Venkata Raeendra Nallagatla; Ravindra Singh Bisht; Dmytro Solonenko; Demian Henzen; Washim Reza Ali; Carla Maria   Lazzari; Robert J.W. Frost; Andrea Serafini; Davide Codegoni; Amalia Balsamo; Rossana Scaldaferri; Elaheh Allahyari; Anirban Ghosh; Martin Kratzer; Andrea  Picco; Sonia  Costantini; Andrea Rusconi; Mohssen Moridi; Humberto Campanella Pineda; Marco Deluca; Annalisa De Pastina

doi:10.1088/1361-6463/ae8c49

Wafer-scale integration of piezo- and ferroelectric Al0.64Sc0.36N thin films by reactive sputtering

Sanjay Nayak
, Venkata Raeendra Nallagatla
, Ravindra Singh Bisht
, Dmytro Solonenko
, Demian Henzen
, Washim Reza Ali
, Carla Maria Lazzari
, Robert J.W. Frost
, Andrea Serafini
, Davide Codegoni
, Amalia Balsamo
, Rossana Scaldaferri
, Elaheh Allahyari
, Anirban Ghosh
, Martin Kratzer
, Andrea Picco
, Sonia Costantini
, Andrea Rusconi
, Mohssen Moridi
, Humberto Campanella Pineda

Research output: Contribution to journal › Article › peer-review

Original language	English
Journal	Journal of Physics D: Applied Physics
Volume	59
Issue number	315102
DOIs	https://doi.org/10.1088/1361-6463/ae8c49
Publication status	Published - 2026

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Cite this

Nayak, S., Nallagatla, V. R., Bisht, R. S., Solonenko, D., Henzen, D., Reza Ali, W., Lazzari, C. M., Frost, R. J. W., Serafini, A., Codegoni, D., Balsamo, A., Scaldaferri, R., Allahyari, E., Ghosh, A., Kratzer, M., Picco, A., Costantini, S., Rusconi, A., Moridi, M., ... De Pastina, A. (2026). Wafer-scale integration of piezo- and ferroelectric Al0.64Sc0.36N thin films by reactive sputtering. Journal of Physics D: Applied Physics, 59(315102). https://doi.org/10.1088/1361-6463/ae8c49

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title = "Wafer-scale integration of piezo- and ferroelectric Al0.64Sc0.36N thin films by reactive sputtering",

author = "Sanjay Nayak and Nallagatla, \{Venkata Raeendra\} and Bisht, \{Ravindra Singh\} and Dmytro Solonenko and Demian Henzen and \{Reza Ali\}, Washim and Lazzari, \{Carla Maria\} and Frost, \{Robert J.W.\} and Andrea Serafini and Davide Codegoni and Amalia Balsamo and Rossana Scaldaferri and Elaheh Allahyari and Anirban Ghosh and Martin Kratzer and Andrea Picco and Sonia Costantini and Andrea Rusconi and Mohssen Moridi and \{Campanella Pineda\}, Humberto and Marco Deluca and \{De Pastina\}, Annalisa",

year = "2026",

doi = "10.1088/1361-6463/ae8c49",

language = "English",

volume = "59",

number = "315102",

}

Nayak, S, Nallagatla, VR, Bisht, RS, Solonenko, D, Henzen, D, Reza Ali, W, Lazzari, CM, Frost, RJW, Serafini, A, Codegoni, D, Balsamo, A, Scaldaferri, R, Allahyari, E, Ghosh, A, Kratzer, M, Picco, A, Costantini, S, Rusconi, A, Moridi, M , Campanella Pineda, H , Deluca, M & De Pastina, A 2026, 'Wafer-scale integration of piezo- and ferroelectric Al0.64Sc0.36N thin films by reactive sputtering', Journal of Physics D: Applied Physics, vol. 59, no. 315102. https://doi.org/10.1088/1361-6463/ae8c49

TY - JOUR

T1 - Wafer-scale integration of piezo- and ferroelectric Al0.64Sc0.36N thin films by reactive sputtering

AU - Nayak, Sanjay

AU - Nallagatla, Venkata Raeendra

AU - Bisht, Ravindra Singh

AU - Solonenko, Dmytro

AU - Henzen, Demian

AU - Reza Ali, Washim

AU - Lazzari, Carla Maria

AU - Frost, Robert J.W.

AU - Serafini, Andrea

AU - Codegoni, Davide

AU - Balsamo, Amalia

AU - Scaldaferri, Rossana

AU - Allahyari, Elaheh

AU - Ghosh, Anirban

AU - Kratzer, Martin

AU - Picco, Andrea

AU - Costantini, Sonia

AU - Rusconi, Andrea

AU - Moridi, Mohssen

AU - Campanella Pineda, Humberto

AU - Deluca, Marco

AU - De Pastina, Annalisa

PY - 2026

Y1 - 2026

U2 - 10.1088/1361-6463/ae8c49

DO - 10.1088/1361-6463/ae8c49

M3 - Article

SN - 0022-3727

VL - 59

JO - Journal of Physics D: Applied Physics

JF - Journal of Physics D: Applied Physics

IS - 315102

ER -