Wafer-level vacuum-packaged translatory MEMS actuator with large stroke for NIR-FT spectrometers

T. Sandner, E. Gaumont, T. Graßhoff, A. Rieck, T. Seifert, G. Auböck, J. Grahmann

Research output: Contribution to journalArticlepeer-review

Original languageUndefined/Unknown
JournalMicromachines
DOIs
Publication statusPublished - 2020

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