Original language | Undefined/Unknown |
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Journal | Micromachines |
DOIs | |
Publication status | Published - 2020 |
Wafer-level vacuum-packaged translatory MEMS actuator with large stroke for NIR-FT spectrometers
T. Sandner, E. Gaumont, T. Graßhoff, A. Rieck, T. Seifert, G. Auböck, J. Grahmann
Research output: Contribution to journal › Article › peer-review