Translatory MEMS actuator with wafer level vacuum package for miniaturized NIR Fourier transform spectrometers

T. Sandner, E. Gaumont, T. Grasshoff, G. Auböck, A. Kenda, T. Gisler, S. Langa, A. Herrmann, J. Grahmann

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

Original language	Undefined/Unknown
Title of host publication	Proceedings of SPIE - The International Society for Optical Engineering
DOIs	https://doi.org/10.1117/12.2290588
Publication status	Published - 2018

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title = "Translatory MEMS actuator with wafer level vacuum package for miniaturized NIR Fourier transform spectrometers",

author = "T. Sandner and E. Gaumont and T. Grasshoff and G. Aub{\"o}ck and A. Kenda and T. Gisler and S. Langa and A. Herrmann and J. Grahmann",

year = "2018",

doi = "10.1117/12.2290588",

language = "undefiniert/unbekannt",

booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

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TY - GEN

T1 - Translatory MEMS actuator with wafer level vacuum package for miniaturized NIR Fourier transform spectrometers

AU - Sandner, T.

AU - Gaumont, E.

AU - Grasshoff, T.

AU - Auböck, G.

AU - Kenda, A.

AU - Gisler, T.

AU - Langa, S.

AU - Herrmann, A.

AU - Grahmann, J.

PY - 2018

Y1 - 2018

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-85049536493&partnerID=MN8TOARS

U2 - 10.1117/12.2290588

DO - 10.1117/12.2290588

M3 - Konferenzartikel

BT - Proceedings of SPIE - The International Society for Optical Engineering

ER -