Temperature Effect on ZnO by Plasma-Enhanced Atomic Layer Deposition

Julian Pilz

Research output: Contribution to conference (No Proceedings) › Abstract › peer-review

Original languageEnglish
Publication statusPublished - Oct 2018
Externally publishedYes
EventAVS 65th International Symposium - Long Beach, United States
Duration: 22 Oct 2018 → 26 Oct 2018

Conference

ConferenceAVS 65th International Symposium
Country/TerritoryUnited States
CityLong Beach
Period22/10/18 → 26/10/18

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