Smith Matching for CMUTs-based Biochemical Resonant Sensor

Yihe Zhao; Libo Zhao; Rahman Hebibul; Zhikang Li; Jie Li; Tingzhong Xu; Shuaishuai Guo; Jiuhong Wang; Yulong Zhao; Zhuangde Jiang

doi:10.1109/NEMS.2019.8915626

Smith Matching for CMUTs-based Biochemical Resonant Sensor

Yihe Zhao, Libo Zhao, Rahman Hebibul, Zhikang Li, Jie Li, Tingzhong Xu, Shuaishuai Guo, Jiuhong Wang, Yulong Zhao, Zhuangde Jiang

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

Abstract

A LC smith matching method for capacitive micromachined ultrasonic transducers (CMUTs) was presented for biochemical application. We completed the fabrication of CMUTs based on the direct bonding technology. A modified Butterworth van-Dyke (BvD) model with lumped elements for functionalized CMUTs were proposed to fit the electrical impedance and phase of CMUTs, which were accurately measured by the impedance analyzer. The series and parallel frequencies of CMUTs were obtained. It is difficult for the functionalized CMUTs to achieve the transmission from capacitive reactance to inductive reactance at relatively low DC voltage. And the proposed LC matching network can optimize the properties of impedance, phase, resistance, especially reactance near the resonant region. This is important for the real-time oscillator design, which needs strict condition for the Barkhausen stability criterion of gain and phase.

Original language	English
Title of host publication	2019 IEEE 14th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
Pages	312-316
Number of pages	5
DOIs	https://doi.org/10.1109/NEMS.2019.8915626
Publication status	Published - 14 Apr 2019
Externally published	Yes
Event	2019 IEEE 14th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Bangkok, Thailand Duration: 11 Apr 2019 → 14 Apr 2019

Conference

Conference	2019 IEEE 14th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
Period	11/04/19 → 14/04/19

Keywords

Resonant frequency
Impedance
Biological system modeling
Mechanical engineering
Biomembranes
Capacitance
Manufacturing systems

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10.1109/NEMS.2019.8915626

https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=8915626

Cite this

@inproceedings{fae7c319a47d4d2daf1c26df6639c5a7,

title = "Smith Matching for CMUTs-based Biochemical Resonant Sensor",

abstract = "A LC smith matching method for capacitive micromachined ultrasonic transducers (CMUTs) was presented for biochemical application. We completed the fabrication of CMUTs based on the direct bonding technology. A modified Butterworth van-Dyke (BvD) model with lumped elements for functionalized CMUTs were proposed to fit the electrical impedance and phase of CMUTs, which were accurately measured by the impedance analyzer. The series and parallel frequencies of CMUTs were obtained. It is difficult for the functionalized CMUTs to achieve the transmission from capacitive reactance to inductive reactance at relatively low DC voltage. And the proposed LC matching network can optimize the properties of impedance, phase, resistance, especially reactance near the resonant region. This is important for the real-time oscillator design, which needs strict condition for the Barkhausen stability criterion of gain and phase.",

keywords = "Resonant frequency, Impedance, Biological system modeling, Mechanical engineering, Biomembranes, Capacitance, Manufacturing systems",

author = "Yihe Zhao and Libo Zhao and Rahman Hebibul and Zhikang Li and Jie Li and Tingzhong Xu and Shuaishuai Guo and Jiuhong Wang and Yulong Zhao and Zhuangde Jiang",

year = "2019",

month = apr,

day = "14",

doi = "10.1109/NEMS.2019.8915626",

language = "English",

isbn = "978-1-7281-1630-3",

pages = "312--316",

booktitle = "2019 IEEE 14th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)",

note = "2019 IEEE 14th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) ; Conference date: 11-04-2019 Through 14-04-2019",

}

Zhao, Y, Zhao, L, Hebibul, R, Li, Z, Li, J, Xu, T, Guo, S, Wang, J, Zhao, Y & Jiang, Z 2019, Smith Matching for CMUTs-based Biochemical Resonant Sensor. in 2019 IEEE 14th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)., 8915626, pp. 312-316, 2019 IEEE 14th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), 11/04/19. https://doi.org/10.1109/NEMS.2019.8915626

TY - GEN

T1 - Smith Matching for CMUTs-based Biochemical Resonant Sensor

AU - Zhao, Yihe

AU - Zhao, Libo

AU - Hebibul, Rahman

AU - Li, Zhikang

AU - Li, Jie

AU - Xu, Tingzhong

AU - Guo, Shuaishuai

AU - Wang, Jiuhong

AU - Zhao, Yulong

AU - Jiang, Zhuangde

PY - 2019/4/14

Y1 - 2019/4/14

N2 - A LC smith matching method for capacitive micromachined ultrasonic transducers (CMUTs) was presented for biochemical application. We completed the fabrication of CMUTs based on the direct bonding technology. A modified Butterworth van-Dyke (BvD) model with lumped elements for functionalized CMUTs were proposed to fit the electrical impedance and phase of CMUTs, which were accurately measured by the impedance analyzer. The series and parallel frequencies of CMUTs were obtained. It is difficult for the functionalized CMUTs to achieve the transmission from capacitive reactance to inductive reactance at relatively low DC voltage. And the proposed LC matching network can optimize the properties of impedance, phase, resistance, especially reactance near the resonant region. This is important for the real-time oscillator design, which needs strict condition for the Barkhausen stability criterion of gain and phase.

AB - A LC smith matching method for capacitive micromachined ultrasonic transducers (CMUTs) was presented for biochemical application. We completed the fabrication of CMUTs based on the direct bonding technology. A modified Butterworth van-Dyke (BvD) model with lumped elements for functionalized CMUTs were proposed to fit the electrical impedance and phase of CMUTs, which were accurately measured by the impedance analyzer. The series and parallel frequencies of CMUTs were obtained. It is difficult for the functionalized CMUTs to achieve the transmission from capacitive reactance to inductive reactance at relatively low DC voltage. And the proposed LC matching network can optimize the properties of impedance, phase, resistance, especially reactance near the resonant region. This is important for the real-time oscillator design, which needs strict condition for the Barkhausen stability criterion of gain and phase.

KW - Resonant frequency

KW - Impedance

KW - Biological system modeling

KW - Mechanical engineering

KW - Biomembranes

KW - Capacitance

KW - Manufacturing systems

UR - https://ieeexplore.ieee.org/document/8915626/

U2 - 10.1109/NEMS.2019.8915626

DO - 10.1109/NEMS.2019.8915626

M3 - Conference Paper

SN - 978-1-7281-1630-3

SP - 312

EP - 316

BT - 2019 IEEE 14th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

T2 - 2019 IEEE 14th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

Y2 - 11 April 2019 through 14 April 2019

ER -

Smith Matching for CMUTs-based Biochemical Resonant Sensor

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